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  • AMS - 3M - Novec 7500

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    3M'" Novec" 7500 Engineered Fluid is a nonflammable fluid with favorable environmental properties. Fluid can be used in cooling of ion implanters, dry etchers and CYD machines in semiconductor and flat panel display manufacturing facilities. Fluid is non-ozone-depleting and has been exempted from the u.s. EPA definition of a volatile organic compound (YOC) because it does not contribute to the formation of photochemical smog.

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    3M'" Novec" 7500 Engineered Fluid is a nonflammable fluid with favorable environmental properties. Fluid can be used in cooling of ion implanters, dry etchers and CYD machines in semiconductor and flat panel display manufacturing facilities. Fluid is non-ozone-depleting and has been exempted from the u.s. EPA definition of a volatile organic compound (YOC) because it does not contribute to the formation of photochemical smog.

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    2K views8 pages

    AMS - 3M - Novec 7500

    Uploaded by

    sshaffer_9
    3M'" Novec" 7500 Engineered Fluid is a nonflammable fluid with favorable environmental properties. Fluid can be used in cooling of ion implanters, dry etchers and CYD machines in semiconductor and flat panel display manufacturing facilities. Fluid is non-ozone-depleting and has been exempted from the u.s. EPA definition of a volatile organic compound (YOC) because it does not contribute to the formation of photochemical smog.

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    Ora) 3M” Novec™ 7500 Engineered Fluid Introduction 3M" Novee™ 7500 Engineered Fluid is a nonflammable uid with very low global warming potential for use in heat transfer applications, Novee 7500 fluid shares many ofthe inertness and dielectric properties of perfluorocarbons (PFCs) and perfluoropolyethers (PFPEs), and isa viable option for replacing them in a wide array of applications, ‘unique heat transfer fluid ‘Semiconductor vith favorable ‘This Novee fluid ean be use in cooling of ion implanters, dry etchers and CVD machines in semiconductor and environmental flat panel display manufacturing facilites, ropeties Test Equipment ‘The fuid may be used to cool semiconductor thermal shock and test equipment Electronic Cooling [Because Novee 7500 fluid is compatible with most electronic components it can be used in direct contact single- and two-phase cooling of supercomputers and sensitive military electronies, and to coo! high voltage transformers and power electronics. Industial/Pharmaceutical ‘Novee 7500 fluid ean also be used as an alternative to commonly used fluids in pharmaceutical and chemical manufacturing processes, such as freeze drying and reactor cooling. ‘STVIISLYH SAY ‘The primary advantage of Novee 7500 fluid over a compatable PFC or PFPE, however, is reduved Global ‘Warming Potential (GWP). Novee 7500 fluid has been developed as a low-GWP alternative to perfluorocarbon and perfluoropolyether heat transfer liquids. ‘Novee 7500 fluid is non-ozone-depleting and has been exempted from the U.S. EPA definition ofa volatile ‘organie compound (VOC) beeause it does not contribute to the formation of photochemical smog WP AFR ORT 801LS-ZL2-998 Nt for specitcation purposes. Al values @ 25°C unless otherwise specified, ued Typical Physical Properties Bolin Pont @ 1 im) 8 Pour Pont") 400 Molecular Wet aa Lg Density an) ve Confcientot Expansion onorz9K Latent Heat of Vaporization @ 1 atm. (kJ/kg) 885 ‘Surface Tension (dynes/cm) 16.2 ons () az Critical Temperature (°C) 261 Critical Pressure (Mpa) 195 ‘Solubility of Fluid in Water <3 ppm by weight Diet Sten 2540.01 gp Voline sty 2.200 oben DieleceCostrt se Fammabity Nonna Novec 7500 Fluid Kinematic Viscosity Viscosity (St) Babe awww Baile numet & SBS emi + oe eae TO To) To determine the viscosity at a given temperature T in Kevin, calculate Z = 10 10% 1.843-5.0874"L00(TIK)))) Then, Viscosity foSt]= (2-07) -exo(-0.7487 - 3.295207) +06119(2-07}*-0.5193(2-0.7))) ‘STVIISLYH SAY WP AFR ORT 801LS-ZL2-998 Nt for specification purposes. All values @ 25°C uness otherwise specified, Typical Physical Properties (continued) 1850 4 1800 1750 4 1700 Novec 7500 Fluid Liquid Density m') g 1600 4 Density (kg 15504 1500 1450 4 1400 +} 0.08. 0.07. 0.06. ‘Thermal Conductivity (W:m'-K’) 0.05. -20 30 80 TEC) Liquid Density ka/m'] = -2.0845°T[°C] + 1665.8 ‘Novec 7500 Fluid Thermal Conductivity -20 30 80 TEPC) ‘Thermal Conductivity (Wim-] = 0.069 -1.798E-04T°C] + 4.24€-07°TI*C}2 130 130 ‘SIVISILYA SAY Wer Ary RTH 801LS-ZL2-998 ELUM om =e Typical Physical Properties (continued) Not for specication Novee 7500 Fluid Liquid Specific Heat Purposes Al values 1400 © 25°C unless otherwise specifi 1300. = 3 120+ sg = 1100 3 = a 1000 900 r + 1 -70 -20 30. 80 130 TO) Liquid Speci Heat [kg-K]= 1.4982"7(°C) + 1091 ‘STVIISLYH SAY = x : A iF 801LS-ZL2-998 Nt or specification purposes. Al values @ 25°C uness otherwise specified, Toxicity Profile ‘The toxicological testing completed on 3M” Novec™ 7500 Engineered Fluid indicates very low overall toxicity. ‘The material is minimally irvtating tothe skin and eyes and tested negative in two mutagenicity screens, In its intended applications a lange margin of safety exists between anticipated exposure and the eight hour me weighted average exposure guideline of 100 ppm. In a 28-day oral toxicity study no adverse effects were ‘observed at 1000 mg pet ke body weight ‘Toxicological Test Results Properties Pn ‘ral so >200 mg/g ‘Acute lethal inhalation concentration | 10,000 pom (6 hour) Eye tation Minima tating sn ition | Nortrtatrg Dermal sensitization Negative ‘Mutagenicity | Negative in the two assays conducted Eeatoiaty ery lw agua taxty 28-day oral toity | |NOAEL 1000 ma‘ Environmental Properties Properties TI Ozone Depletion Potential’ (ODP) 00 cn erty wt) % Pe Fa ite Os cmon 00 ve Gl = os eye, 10 yr rer ine ern FH PCE 2001 me ‘STVIISLYH SAY WP AFR ORT 801LS-ZL2-998 3M aw SSI Eee) Environmental, Health and Safety Before using this product, please read the current product Material Safety Data Sheet (available through your 3M sales or technical service representative) and the precautionary statement on the product package. Follow all applicable precautions and directions. 3M" Novee™ 7500 Engineered Fluid is nonflammable and does not exhibit flammability charaeteristies under normal operation and storage conditions, The fluid is resistant to thermal breakdown and hydrolysis during storage and use. Recommended handling procedures are provided in the Material Safety Data Sheet, which i available from your local 3M representative upon request. Materials Compatibility In practice, Novec engineered fluids differ somewhat from PFCs and PFPEs in their ability to dissolve certain cils. This means that Novee 7500 fluid is more likely fo extract plasticizers from elastomeric materials. For this reason, elastomeric O-ring and seal materials should be limited to thase that contains a low amount of plasticizer. EPDM, EPR and butyl typically fall into this category. 3M engineers can suggest appropriate ‘compounds or assist with test procedures, Heater Selection “The erticl heat flux of Novee 7500 fluid was found to be 18 Wiem? when boiling from a horizontal 0 mim diameter platinam wire ina quiescent poo! of saturated fluid. The maximum heat flux obtainable in forced convection applications is significantly higher, but depends strongly upon the geometry and flow conditions A safety interlock between the pump and heater is strongly recommended in applications with heat fluxes exceeding 15 Wien? Regulatory Status ‘The components ofthis product are in compliance with the chemical notification requirements of the United States (TSCA), Europe (ELINCS), Korea and the Philippines. Novec 7500 fluid is not acceptable for ‘commercial sale in Japan, Certain restrictions apply. Contact the selling division for additional information, ‘STVIISLYH SAY Contact your local 3M representative regarding the regulatory status of Nove 7500 fluid in other countries. = r : i is iF 801LS-ZL2-998 Recycle and Disposal Options Used Fluid Return Program 3M offers a program for free pickup and return of used 3M specialty duids in the U.S. A pre-negotiated handling agreement between users and our authorized service provider offers users beoad protection against future liability for used 3M product, The fuid return program is covered by independent third-party financial and environmental audits of treatment, storage and disposal facilities. Necessary documentation is provided, A minimum of 30 gallons of used 3M specialty uid is required for participation in this fre program. For additional information on the 3M Used Fluid Return Program, contact your local 3M representative or call 3M Customer Service at 800.810.8513. Resources 3M” Novee™ Engineered Fluids are supported by global sales, technical and customer service resources, with technical service laboratories in the U.S. Europe, Japan, Latin America and Southeast Asia. Users benefit from 3M's broad technology base and continuing attention to product development, performance, safety and eavizonmental issues. Fo additional technical information on 3M" Novee™ 7500 Engineered Fluid in the United States or forthe name of a local authorized distributor, call 3M Electronics Markets “Materials Division: 800 810 8513. ‘SIVISILYA SAY & & : A iF 801LS-ZL2-998 STE) ‘The 3M™ Novec™ The ove brand eth natmark ora variety a paented a products Albaup each has ts own que ool and performance proper, a Brand Family Noe products ae descnet a concn oats the ned forsale, eect, sista soluionsinndusty-speccaplcatins. Tes ice ocison ad lctoncs caning, at rater re rtacton ca Gpostion ant save spect conical ppcatons. {I Noe” Engeeed Fh Nee Aerol Cane aN Nove 1290 Fie Proecton d= Nowe” Econ Coathga 2M Nowe Becore Surfactants United states hina Europe gan Korea Singapore MEwctons Markets 3M'ChraLe SM BelumNv, Suntomo3M Lintod 14 KavenLnteé SM ingore Pe. Li. teal sion aoziezrsas05 | 2aze0 Tee 81337098250 eezarrians 56408 an s10 8818, Produc se: i sseents, teh inermaton ae racmmeetons erties ecuman tesa se reper that bloes ate rate Honave, may fais beyond Ms contol can fet he ue an perfomance of 3M pad in partir aot, ring contions uncer whe hs products ued an the ‘ine ané encnmestal onions in we te product expected operon. Sce these atts are unauely within he uses knoeledge ard contol tis esertal at the or eit th 3M rou to dotermine whut ifr apartcubr pupae an sublet urs ed appcaton. Warranty and Limited Remedy: Unies tates tevin 3's roduc tect, sackacn seis o product sakaxn nd rues

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