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    X-ray lithography is the process of patterning parts of a thin film or the bulk of a substrate. The pattern is transferred from a mask to a layer on the substrate. We can obtain smaller dimensions with x-ray and hence we have the choice of choosing yet smaller feature size in the ever-ending process of scaling as per Moore's law.

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    X-ray lithography is the process of patterning parts of a thin film or the bulk of a substrate. The pattern is transferred from a mask to a layer on the substrate. We can obtain smaller dimensions with x-ray and hence we have the choice of choosing yet smaller feature size in the ever-ending process of scaling as per Moore's law.

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    9 views1 page

    EE669 PROJECT - Odt

    Uploaded by

    kbkkr
    X-ray lithography is the process of patterning parts of a thin film or the bulk of a substrate. The pattern is transferred from a mask to a layer on the substrate. We can obtain smaller dimensions with x-ray and hence we have the choice of choosing yet smaller feature size in the ever-ending process of scaling as per Moore's law.

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    © All Rights Reserved
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    X-RAY LITHOGRAPHY

    Lithography is the process of patterning parts of a thin film or the bulk of a substrate.The pattern is
    transferred from a mask to a layer on the substrate.There are different techniques to do lithography
    like
    a)photolithography
    b)electron beam lithography
    c)ion beam lithography
    d X-ray lithography
    All the above processes have merits & demerits
    We can obtain smaller dimensions with X-ray and hence we have the choice of choosing yet smaller
    feature size in the ever-ending process of scaling as per Moore's law.

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