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INTRODUCTION TO
MICROELECTRONIC
FABRICATION SECOND
EDITION
by

RICHARD C. JAEGER
First Printing Errata - Updated 07/30/03
Page number: Correction
42: Problem 2.5 180-nm should be 120-nm.
65: Problems 3.11 and 3.12: Assume a temperature of 1100 oC.
104: Problem 4.4(b) should refer to Fig. 4.12 .
106: Problem 4.10(e) should refer to part (d) .
106: Figure P4.10: The spacings between resistor legs should all be 3l.
107: Problem 4.14: Assume NB = 1016/cm3 .
107: Problem 4.15: Assume a 0.3 W-cm p-type substrate.

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107: Problem 4.21(c): the temperature should be 950 oC; Problem 4.21(d)
should refer to Fig. 4.12.
128: Problem 5.18: "minimum substrate temperature" should be " maximum
substrate temperature"
150: Problem 6.5: 1000 molecules/cm3 ; Problem 6.14: A1 should be Al
169: The gray shading in Fig. 7.18 is almost invisible. Here is a corrected
drawing: Download Fig. 7.18
171: The gure captions for Fig. 7.20 are reversed.
176: Problem 7.12(c): ... if a 1- mm thick "low-K"...
199: Problem 8.4: Compare the ve yield ...; Problem 8.5 should refer to Fig.
8.16 not Fig. 8.11.
200: Problem 8.12. Assume a die cost of $1.00 to nd the die sizes.
200: Problems 8.13 and 8.15: References to Fig. 8.11 should be to Fig. 8.16.
212: Paragraoh above Section 9.2: "scale factor a = square root of 2"
265: Problem 10.2: NE/DE = should be GE = ...; Problem 10.3: What epitaxial
layer doping may
267: Problem 10.13: Reference should be to Table 10.1 not Table 10.2.
268: Problem 10.22: "What is a lower bound ..."; Problem 10.27: 1 m should be
1 mm.
270: Table 11.1: Density should be in g/cm3 .
273: Third line: 22o should be 35o.
Answer Corrections
1.5
1.13

34.4 x 109 transistors


1 M, 16 M, 100 M

3.7

3.1 hours, 74 hours

4.3

5.21 hrs

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4.15

14.5, 34.9, 203, 2840, 9.72, 12.5

5.1

3.5 x 1018/cm3, 7.5 x 1013/cm2 , 0.47 mm

5.3

900 keV, 0.13 mm

5.5

1.0 x 1015/cm2, 10.5 hrs

5.7

60.7 sec

5.11

2.69 x 104 m/sec should be 8.85 x104 m/sec

5.13

53 nm, 870 nm

6.1

820 psec

6.3

2.68 x 1020 molecules/sec, 72 m, 7.5 x 10-7 Torr

6.11

1247oC, delete 0.35 eV

6.15

0.886, 0.886, 0.769

6.17

N(x) = 1020{1 + erf [(x-2)/0.045]} /cm3

7.5

5 x 10-9W-cm2

8.3

392, 492, 3746

8.7

$4.06 vs. $4.89, $6.52 vs. $6.57

8.13

17%, 8.3%

9.13

-0.16 V, -1.21 V, 1.67 x 1012/cm2, 3.02 x 1011 /cm2

9.21

384 l2, 40 l 2

10.3

90 V

10.9

2/3, 2 , 2d(W+L)/WL ...

10.13

193 kW, 9.63 kW, 803 W

10.19

33 nm

10.27

6-7 V, 8 V

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