Application Note

RGA Application Bulletin #208

Spectra Reference

Note #03/02

SPECTRAL DATA
SUBSTANCE

MASS NUMBER/PERCENTAGE OF MAJOR PEAK

1
Hydrogen
Helium
Methane
Ammonia
Water
Neon
Acetylene
Diborane
Vinyl Chloride
Nitrogen
Carbon Monoxide
Ethylene
Ethane
Air
Propane
Acetaldehyde
Formic Acid
Nitric Acid
Silane
Nitrogen Dioxide
Methanol
Ethylene Glycol
Ethanol
Oxygen
Hydrogen Sulfide
Argon
Propene
Acetone
Butane
Methyl Ethyl Ketone
MP Oil
Acetic Acid
Turbopump Oil
Carbon Dioxide
Nitrous Oxide
Isopropyl Alcohol
Boron Trifluoride
DP Oil PPE
Nitrogen Trifluoride
Disilane

2/100
4/100
16/100
17/100
18/100
20/100
26/100
26/100
27/100
28/100
28/100
28/100
28/100
28/100
29/100
29/100
29/100
30/100
30/100
30/100
31/100
31/100
31/100
32/100
34/100
40/100
41/100
43/100
43/100
43/100
43/100
43/100
43/100
44/100
44/100
45/100
49/100
50/100
52/100
60/100

1/5
15/85
16/80
17/25
22/9
25/20
27/96
62/88
14/7
16/10
26/61
27/33
32/27
28/59
44/45
46/61
14/7
31/80
46/37
32/66
33/28
45/34
16/11
32/44
20/10
39/73
15/67
29/44
29/25
41/91
45/93
57/88
28/11
30/31
43/16
48/28
77/89
33/40
58/82

SUBSTANCE

14/16
15/8
1/6

13/8
14/2
16/2

1/4

13/5
24/95
28/36
29/1
12/5
27/59
30/26
14/6
27/38
43/27
45/47
15/2
29/31
16/22
29/64
15/18
27/24

54/5
25/57
26/33

27/3
11/40
64/27

29/1
25/12
26/23
16/3
44/26
42/9
17/17
16/1
28/28
14/9
28/6
29/17
29/23

33/42

36/34

35/2

42/69
28/17
27/37
72/16
57/73
60/57
41/76
16/9
14/13
27/16
68/5
63/29
71/31
57/48

27/38
14/15
28/32
27/16
55/64
29/15
55/73
12/6
28/11
29/10
11/5
62/27
14/9
62/42

40/29
58/15
41/27
57/6
71/20
42/1
71/52
45/1
16/5
41/7
19/3
64/21
19/8
61/40

2/2

14/8
29/21
40/1
43/22
26/9
28/17
32/8
18/2
43/7
46/17

MASS NUMBER/PERCENTAGE OF MAJOR PEAK

1
Diphosphine
Sulfur Dioxide
Fomblin
Trifluoromethane
Tetrafluoromethane
Freon 13
Carbon Disulphide
Arsine
Benzene
DP Oil DC705
Krypton
Freon 12
Silicon Tetrafluoride
Toluene
Trichloroethylene
Freon 11
Xenon

62/100
64/100
69/100
69/100
69/100
69/100
76/100
76/100
78/100
78/100
84/100
85/100
85/100
91/100
95/100
101/100
132/100

2
64/70
48/49
20/28
51/91
50/12
85/15
32/21
78/60
77/22
76/83
86/31
87/32
87/12
92/69
60/65
103/60
129/98

3
63/59
32/10
16/16
31/49
19/7
50/14
44/17
77/21
51/18
39/73
83/20
50/16
28/12
65/16
97/64
35/16
131/79

4
65/26
66/5
31/9
50/42
31/5
31/9
78/9
75/4
50/17
43/59
82/20
35/12
33/10
51/10
35/40
66/15
134/39

5
66/2
16/5
97/8
12/4
35/7
38/6
52/15
91/32
80/4
86/5
63/9
47/26
47/12
136/33

Page 2

Application Note

IONIZATION PROBABILITY
SUBSTANCE

Acetone
Air
Ammonia
Argon
Benzene
Benzoic acid
Bromine
Butane
Carbon dioxide
Carbon disulfide
Carbon monoxide
Chlorobenzene
Chloroethane
Chloromethane
Cyclohexylene
Deuterium
Dichlorofloromethane
Dichloromethane
Dinitrobenzene
Ethane
Ethanol
Ethylene Oxide
Helium
Hexane
Hydrogen
Hydrogen chloride
Hydrogen fluoride
Hydrogen iodide
Hydrogen sulfide
Krypton
Lithium
Methane
Methanol
Neon
Nitrogen
Nitric oxide
Nitrous oxide

FORMULA

RELATIVE IONIZATION
GAUGE SENSITIVITY
Signal/Signal Nitrogen

(CH3)2CO
NH3
Ar
C6H6
C6H5COOH
Br
C4H10
CO2
CS2
CO
C6H5CI
C2H5CI
CH3CI
C6H12
D2
CCI2F2
CH2CI2
C6H4(NO2)2
C2H6
C2H5OH
(CH2)2O
He
C6H14
H2
HCI
HF
HI
H2S
Kr
Li
CH4
CH3OH
Ne
N2
NO
N2O

3.6
1.0
1.3
1.2
5.9
5.5
3.8
4.9
1.4
4.8
1.05
7.0
4.0
3.1
6.4
0.35
2.7
3.7
7.8
2.6
3.6
2.5
0.14
6.6
0.44
1.6
1.4
3.1
2.2
1.7
1.9
1.6
1.8
0.23
1.0
1.2
1.7

SUBSTANCE

FORMULA

Oxygen
n-Pentane
Phenol
Phosphine
Propane
Silver perchlorate
Stannic iodide
Sulfur dioxide
Sulfur hexafloride
Tetrachlorom ethane
Toluene
Trichlorom ethane
Trinitrobenzene
W ater
Xenon
Xylene

O2
C5H12
C6H5OH
PH3
C3H8
AgCIO 4
SnI4
SO2
SF6
CCI4
C6H5CH3
CHCI3
C6H3(NO 2)3
H2O
Xe
C6H4(CH3)2

RELATIVE IONIZATION
GAUGE SENSITIVITY
Signal/Signal Nitrogen
1
6
6.2
2.6
3.7
3.6
6.7
2.1
2.3
6
6.8
4.8
9
1
3
7.8

For further information, call your local MKS Sales Engineer or contact the MKS Applications Engineering Group at 800-227-8766.
App. Note #03/02 - 5/05
2005 MKS Instruments, Inc.
All rights reserved.

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