2001 by Prentice Hall Semiconductor Manufacturing Technology
by Michael Quirk and Julian Serda
Semiconductor Manufacturing Technology
Michael Quirk & Julian Serda October 2001 by Prentice Hall
Chapter 20
Assembly and Packaging
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Objectives 1. Describe the general trends and design constraints of assembly and packaging. 2. State and discuss the traditional assembly methods. 3. Describe the different traditional packaging options. 4. Discuss the benefits and limitations of seven advanced assembly and packaging techniques.
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Four Important Functions of IC Packaging 1. Protection from the environment and handling damage. 2. Interconnections for signals into and out of the chip. 3. Physical support of the chip. 4. Heat dissipation.
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Traditional Assembly and Packaging Wafer Test and Sort Wire Bond Die Separation Plastic Package Final Package and Test Die Attach Figure 20.1
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Typical IC Packages Quad flat pack (QFP) Leadless chip carrier (LCC) Plastic leaded chip carrier (PLCC) Dual in-line package (DIP) Thin small outline package (TSOP) Single in-line package (SIP) Figure 20.2
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Design Constraints for IC Packaging Performance RC Time delay Number of signal I/Os Wirebond vs. bump attachment Package impedance Signal rise time Switching transients Thermal Size/weight/form Chip size Package size Bond pads size and pitch Package leads size and pitch Substrate carrier pads size and pitch Design of heat sink Materials Chip substrate (plastic, ceramic, metal) Carrier (organic, ceramic) Thermal expansion mismatch Lead metallurgy Cost Integration into existing process Package materials Yield Assembly Method of die attach Package attach (through hole, surface mount, bumped) Heat sink assembly Encapsulation
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Levels of IC Packaging 2nd level packaging: Printed circuit board assembly First level packaging: IC packaging Final product assembly: Final assembly of circuit boards into system
Metal leads for mounting onto printed circuit board Pins Pins are inserted into holes then soldered on rear of PCB. Surface- mount chips are soldered on top of tinned pads on the PCB. Edge connector plugs into main system. PCB subassembly Main electronics assembly board Leads Figure 20.3
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Traditional Assembly Wafer preparation (backgrind) Die separation Die attach Wire bonding
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Schematic of the Backgrind Process Rotating and oscillating spindle Wafer on rotating chuck Downforce Table rotates only during indexing of wafers Figure 20.4
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Wafer Saw and Sliced Wafer Wafer Stage Blade Figure 20.5
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Typical Leadframe for Die Attach Die Lead Leadframe Plastic DIP Figure 20.6
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Epoxy Die Attach Die Epoxy Leadframe Figure 20.7
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Au-Si Eutectic Attach Silicon Gold film Gold/silicon eutectic alloy Al 2 O 3
Figure 20.8
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Wires Bonded from Chip Bonding Pads to Leadframe Moulding compound Leadframe Bonding pad Die Bond wire Pin tip Figure 20.9
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Wirebonding Chip to Leadframe
Photo 20.1
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Thermocompression Bonds Post Device bond pad Figure 20.10
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Ultrasonic Wirebonding Sequence Wire Wedge tool (1) Tool moves upward. More wire is fed to tool. (3) Ultrasonic energy Pressure Lead frame (4) Tool moves upward. Wire breaks at the bond. (5) (2) Al bonding pad Ultrasonic energy Pressure Die Figure 20.11
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Thermosonic Ball Bond (2) H2 torch Ball (1) Gold wire Capillary tool (5) Pressure and heat form bond. Lead frame (6) Tool moves upward. Wire breaks at the bond. Bonding ball on pad Pressure and ultrasonic energy Die (3) Tool moves up and more wire is fed. Die (4) Figure 20.12
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Wirebond Pull Test Post Device Chip under test Hook Specimen clamp Figure 20.13
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Traditional Packaging Plastic Packaging Ceramic Packaging
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda TO-Style Metal Package Figure 20.14
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Tie Bar Removal from Leadframe Die Leadframe Tie bar Tie bar removal lines Figure 20.15
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Plastic Dual In-Line Package (DIP) for Pin-In-Hole (PIH) Figure 20.16A
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Single In-Line Package (SIP) Figure 20.16B
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Thin Small Outline Package (TSOP) with Gull wing Surface Mount Leads Figure 20.16C
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Single In-Line Memory Module (SIMM) Figure 20.16D
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Quad Flatpack (QFP) with Gull Wing Surface Mount Leads Figure 20.16E
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Plastic Leaded Chip Carrier (PLCC) with J-Leads for Surface Mount Figure 20.16F
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Leadless Chip Carrier (LCC) Figure 20.16G
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Laminated Refractory Ceramic Process Sequence Ceramic interconnect layers 4-layer laminate Figure 20.17
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Ceramic with Pin Grid Array Courtesy of Advanced Micro Devices
Photo 20.2
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda CERDIP Package Ceramic lid Glass seal Ceramic base Metal lead Chip on epoxy and leadframe Cross-section Indexing notch Plane of cross-section Figure 20.18
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Test Socket for IC Package Figure 20.19
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Advanced Packaging Flip chip Ball grid array (BGA) Chip on board (COB) Tape automated bonding (TAB) Multichip modules (MCM) Chip scale packaging (CSP) Wafer-level packaging
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Flip Chip Package Solder bump on bonding pad Silicon chip Substrate Connecting pin Metal interconnection Via Figure 20.20
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda C4 Solder Bump on Wafer Bonding Pad Reflow Process Metal Deposition and Etch 2-layer metal deposition
Sn
Pb (3) Solder bumps form during reflow (4) Oxide Nitride Al Bonding pad (1) 3-layer metal stack Cu-Sn Cr+Cu Cr (2) Figure 20.21
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Epoxy Underfill for Flip chip Solder bump
Chip
Epoxy
Substrate Figure 20.22
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Flip Chip Area Array Solder Bumps Versus Wirebond Bonding pad perimeter array Flip chip bump area array Figure 20.23
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Chip with Ball Grid Array
Photo 20.3
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Ball Grid Array Molded cover
Wire
Substrate
Metal via
Solder ball Chip Bonding pad Epoxy Thermal via Figure 20.24
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Chip on Board (COB) IC chip Printed circuit board Figure 20.25
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Tape Automated Bonding (TAB) Poyimide tape Copper leads Figure 20.26
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Multichip Module (MCM) MCM substrate Individual die Figure 20.27
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Trends for Advanced Packaging 1996 2001 1997 1998 1999 2000 0 1800 600 900 1200 1500 300 Direct Chip Attach Flip Chip on Board Tape Auto. Bonding Other U n i t s
( m i l l i o n s )
Years Redrawn from S. Winkler, Advanced IC Packaging Markets and Trends, Solid State Technology, (June 1998): p. 63. Figure 20.28
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Diversity of Chip Scale Packages 18
General CSP Approach CSP Package Name Company Area array, bumped CSP Amkor/Anam Small outline no-lead/C-lead (SON/SOC) Fujitsu Bump chip carrier (BCC) Fujitsu Micro-stud-array (MSA) Hitachi Bottom leaded plastic (BLP) LG Semicon Quad flat no-lead (QFN) Matsushita Memory CSP TI Japan Custom Leadframe Quad outline non-leaded Toshiba Enhanced flex CSP 3M FleXBGA Amkor/Anam FBGA Fujitsu Chip-on-flex CSP GE Multi chip scale package (MCSP) Hightec MC AG CSP for memory devices Hitachi IZM flexPAC Fraunhofer Institute Molded Ball Grid Array Mitsubishi Electric Chip-on-flex Chip Size Package Motorola Singapore Fine-pitch BGA (FPBGA) NEC Interposer (flexible material with interconnects) between die and substrate MicroBGA Tessera Chip Array Package (CABGA) Amkor/Anam CSP Cypress Semiconductor Ceramic mini-BGA IBM Molded array process CSP Motorola Plastic chip carrier National CSP Oki Electric Transformed grid array package Sony Rigid Substrate Ceramic/plastic fine-pitch BGA Toshiba Table 20.2
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Wafer-Level Packaging Single chip with C4 bumps Figure 20.29
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda C4 Bumped Wafer Photograph provided courtesy of Advanced Micro Devices
Photo 20.4
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Design Concept for Wafer-Level Packaging Redrawn from V. Di Caprio, M. Liebhard, and L. Smith, The Evolution of a New Wafer-level Chip Size Package, Chip Scale Review, (May/June 1999). Chip Adhesive Bonded wire Solder bump Figure 20.30
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Comparison of Standard Test Flow with Wafer-Level Package Test Flow
WLP fabrication In-situ WLBI Wafer-level functional test Dicing Wafer-level pick at board assembly WLP Test Flow Load into tape and reel Wafer probe Dice wafer Package individual ICs Socket/burn-in at package level Functional test at package level Standard Test Flow Figure 20.31
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Wafer-Level Packaging Features and Benefits Parameter Benefits Package size The package is equal to the chip size in x and y dimensions. It is the smallest possible IC package and minimizes the package weight. Mounted package height It is extremely thin with a total height < 1.0 mm as measured from the circuit board surface after 2 nd level assembly. Component reliability Test results indicate that wafer-level packaging components pass existing reliability tests for passivated components. Solder joint reliability Test results indicated solder joint reliability meets standard thermal cycle (-65 to 125C) reliability tests. Electrical performance Electrical simulation tests indicates that the die face-down (flip chip) configuration of wafer-level packaging with its short circuit traces results in very good electrical performance for minimizing inductance and parasitic capacitance losses. Integration with existing SMT infrastructure The wafer-level package is compatible with existing surface mount technology and uses standard solder balls and ball pitches. Alpha-particle protection Radioactive elements occurring naturally in packaging materials emit alpha-particles that can cause voltage loss in memory cells. The use of polyimide tape and film adhesive provides alpha-particle protection for memory chips. Low system cost The use of existing materials with wafer integration to reduce handling and a wafer test strategy to minimize duplicate testing provides for a low overall system cost. Table 20.3
2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Chapter 20 Review Quality Measures 596 Troubleshooting 597 Summary 597 Key Terms 598 Review Questions 598 Equipment Suppliers Web Sites 599 References 600